High‑speed Inserting
High‑speed Inserting
Solution Overview
For ALD/diffusion wafer loading, the ER35B-1810-LI robot is adopted, suitable for fully automatic robotic loading and unloading of quartz boats and aluminum boats in solar silicon cell production.
For PECVD coating wafer loading, the high-speed and high-precision ER15-1430-MI robot is adopted, suitable for fully automatic robotic loading and unloading of graphite boats in solar silicon cell production.
Case Features
1. Reliability
High reliability in silicon wafer picking and placing, reducing wafer breakage and scratching rates, with a yield rate of >99.975%.
2. High Precision
The robot's high-rigidity body meets the high-precision requirements of wafer loading.
3. High Capacity
It meets the capacity requirements of wafer loading equipment and is compatible with 182/210 cells. ALD/diffusion wafer loading capacity >13,000 pcs/h, and PECVD coating wafer loading capacity >9,000 pcs/h.
